What is NF3 (nitrogen trifluoride)?

NF3 (nitrogen trifluoride) in the explanations

• Fluorine radicals made by decomposing NF3 in a plasma remove these deposits.

  What is the main use of nitrogen trifluoride (NF3)?

• Vapor-phase (dry) cleans using HF vapor or radicals from NF3/NH3 plasmas (as in SiCoNi processing) involve no liquid, eliminating collapse risk, and can be vacuum-linked to deposition chambers so wafers proceed without reoxidizing.

  To prevent fine structures from collapsing, which method re…

• The remote plasma method decomposes NF3 highly efficiently outside the chamber and sends only fluorine radicals into it, greatly reducing greenhouse gas emissions.

  For chamber cleaning of CVD equipment, which method has bee…

Questions that mention NF3 (nitrogen trifluoride) (3)

1. What is the main use of nitrogen trifluoride (NF3)?
2. To prevent fine structures from collapsing, which method removes native oxide and the like without using liquids?
3. For chamber cleaning of CVD equipment, which method has been adopted to reduce PFC emissions?

Related terms

CVD Plasma Native oxide Arsine (AsH3) Mass flow controller (MFC) Phosphine (PH3) Precursor Silane (SiH4) Specialty gases TMAH