What is Multilevel interconnect?
A structure that stacks many wiring layers separated by insulating films and connects them vertically with vias. Leading-edge LSIs have more than ten layers.
Field: Interconnect processes
A structure that stacks many wiring layers separated by insulating films and connects them vertically with vias. Leading-edge LSIs have more than ten layers.
Field: Interconnect processes
Middle-of-line (MOL) refers to the processes and structures between transistor fabrication (FEOL) and the multilevel interconnect (BEOL): contacts to sources, drains and gates and local interconnects.
Which term refers to the contacts and local interconnects t…MOL (middle of line) Air gap Backside power delivery Barrier metal Black's equation Crosstalk Damascene process Dual damascene Interconnect via IR drop