What is Air gap?

Leaving part of the insulator between wires as empty space. Since air has a relative permittivity of about 1, it greatly reduces capacitance between wires.

Field: Interconnect processes

Air gap in the explanations

At delaminated areas, the air gap reflects sound strongly, so delamination between resin and chip or leadframe, cracks and voids can be found non-destructively.
Which tool is widely used to find delamination at interface…

Questions that mention Air gap (2)

What is the main purpose of the technique that makes part of the insulator between wires a cavity (air gap)?
Which tool is widely used to find delamination at interfaces inside a package, such as between molding compound and chip, non-destructively?

Related terms

Backside power delivery Barrier metal Black's equation Crosstalk Damascene process Dual damascene Interconnect via IR drop Low-k material MOL (middle of line)

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