What is MOL (middle of line)?
The contacts and local interconnects that link transistors (FEOL) to the multilevel wiring (BEOL). With scaling, their resistance has grown and now limits performance.
Field: Interconnect processes
MOL (middle of line) in the explanations
Middle-of-line (MOL) refers to the processes and structures between transistor fabrication (FEOL) and the multilevel interconnect (BEOL): contacts to sources, drains and gates and local interconnects.
Which term refers to the contacts and local interconnects t…
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Related terms
Multilevel interconnect Air gap Backside power delivery Barrier metal Black's equation Crosstalk Damascene process Dual damascene Interconnect via IR drop