What is Backside power delivery?
Placing the power wiring on the back of the wafer so the front-side wiring can be used for signals. It reduces voltage drop and routing congestion.
Field: Interconnect processes
Backside power delivery in the explanations
Backside power delivery thins the wafer to hundreds of nm or a few µm and places thick power wiring on its back, feeding transistors from below.
Which correctly describes backside power delivery, which is…Performance gains therefore now come largely from extrinsic improvements: better contact materials, air-gap or low-k spacers, and backside power delivery.
In highly scaled transistors, which factors are becoming in…Flexible nanosheet widths and pairing with new technologies such as backside power delivery are key to GAA's performance gains.
Which company and generation were first to announce volume …
Questions that mention Backside power delivery (4)
- Which correctly describes backside power delivery, which is being introduced in advanced logic?
- In highly scaled transistors, which factors are becoming increasingly important limits on performance?
- Which company and generation were first to announce volume production of GAA (nanosheet) transistors?
- Which is closest to the number of wiring layers in advanced logic LSIs?
Related terms
On-resistance GAA (gate-all-around) Nanosheet Air gap Barrier metal Black's equation Crosstalk Damascene process Dual damascene Interconnect via