Metrology and analysis

What is mainly measured by the four-point probe method?

  1. ASheet resistance
  2. BFilm stress
  3. CSurface roughness
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Answer: A. Sheet resistance

In the four-point probe method, four needles in a straight line contact the sample; current flows through the outer two and voltage is measured across the inner two. Separating the current and voltage probes allows sheet resistance to be measured without the influence of contact resistance. It is used to evaluate diffused layers and metal films.

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