Metrology and analysis

Which analysis method determines surface elements and their chemical bonding states from the energies of photoelectrons emitted under X-ray irradiation?

  1. AAtomic force microscopy (AFM)
  2. BXPS (X-ray photoelectron spectroscopy)
  3. CFour-point probe method
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Answer: B. XPS (X-ray photoelectron spectroscopy)

XPS shines X-rays on the surface and measures the energies of the photoelectrons ejected, determining which elements are present and their chemical bonding states, such as whether they are oxidized. It gives information on the top few nm, so it is used to evaluate thin films, interfaces and surface treatments.

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