What is Four-point probe method?
A method that passes current through the outer two of four collinear needles and measures voltage across the inner two to find the sheet resistance of wafers and thin films.
Field: Metrology and analysis
Four-point probe method in the explanations
In the four-point probe method, four needles in a straight line contact the sample; current flows through the outer two and voltage is measured across the inner two.
What is mainly measured by the four-point probe method?
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Related terms
AFM (atomic force microscope) CD-SEM Defect inspection system EDX (energy-dispersive X-ray spectroscopy) Ellipsometry FIB (focused ion beam) SEM (scanning electron microscope) SIMS (secondary ion mass spectrometry) TEM (transmission electron microscope) TXRF (total reflection X-ray fluorescence)