Metrology and analysis

Which instrument traces a sample surface with a fine stylus and measures step heights and surface shape from the stylus's vertical motion?

  1. AMass spectrometer
  2. BStylus profiler
  3. CEllipsometer
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Answer: B. Stylus profiler

A stylus profiler traces the surface with a fine-tipped stylus at constant force and measures step heights and surface waviness from its vertical displacement. It is used to check etch depth, film steps and post-CMP planarity. It covers a wider range than AFM, scanning over millimeters.

  • A. A mass spectrometer identifies components from ion masses.
  • B. Correct. It traces the surface with a stylus to measure steps.
  • C. An ellipsometer measures film thickness from changes in polarization.
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More Metrology and analysis questions

  1. What is the technique called that uses statistical models to predict film thickness or dimensions of wafers that were not actually measured, from equipment sensor data and the like?
  2. When measuring very narrow trenches or steep sidewalls with AFM, what tends to cause errors?
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  4. Which analysis method field-evaporates atoms one by one from the tip of a needle-shaped specimen and detects their positions and identities to map the 3D distribution of atoms such as dopants?
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