An analysis method that determines the elements in the top few nanometers of a surface and their chemical bonding states from the energies of photoelectrons emitted under X-ray irradiation.
Field: Metrology and analysis
XPS shines X-rays on the surface and measures the energies of the photoelectrons ejected, determining which elements are present and their chemical bonding states, such as whether they are oxidized.
Which analysis method determines surface elements and their…AFM (atomic force microscope) CD-SEM Defect inspection system EDX (energy-dispersive X-ray spectroscopy) Ellipsometry FIB (focused ion beam) Four-point probe method SEM (scanning electron microscope) SIMS (secondary ion mass spectrometry) TEM (transmission electron microscope)