What is the approach called that combines data from multiple measurement methods (optical, CD-SEM, AFM and so on) to determine dimensions and shapes more accurately than any single method?

Answer: B. Hybrid metrology

For leading-edge fine structures, any single method is limited in what it can measure and how precisely. Hybrid metrology feeds values measured accurately by one method (such as film thickness) into another method's analysis model and so on, so the methods compensate for each other's weaknesses and give more accurate results.

• A. This is not a common metrology approach by that name.
• B. Correct. It combines methods to improve accuracy.
• C. This is not a common metrology approach by that name.