What is SPM (sulfuric acid-hydrogen peroxide mixture)?
A mixture of sulfuric acid and hydrogen peroxide. Its strong oxidizing power removes organics such as resist.
Field: CMP and cleaning
SPM (sulfuric acid-hydrogen peroxide mixture) in the explanations
SPM (H2SO4:H2O2, e.g., 4:1 at about 120–150 °C) forms peroxymonosulfuric acid (Caro's acid), whose powerful oxidizing action decomposes organic residues such as resist.
What is the main purpose of cleaning with a mixture of sulf…It reverts to oxygen after use, simplifying waste treatment, and compared with SPM, which consumes large amounts of sulfuric acid and peroxide, it reduces chemical use and CO2 emissions.
What is the main purpose of cleaning with ozone dissolved i…Each is addressed with suitable chemistries (SC-1, SC-2, SPM, dilute HF) combined with physical action (brushes, megasonics), all without damaging the materials being cleaned.
Which set correctly lists the kinds of surface contaminatio…
Questions that mention SPM (sulfuric acid-hydrogen peroxide mixture) (4)
- What is the main purpose of cleaning with a mixture of sulfuric acid and hydrogen peroxide (SPM)?
- Which known problem tends to occur if rinsing after SPM (sulfuric acid and hydrogen peroxide) cleaning is insufficient?
- What is the main purpose of cleaning with ozone dissolved in ultrapure water (ozonated water)?
- Which set correctly lists the kinds of surface contamination removed from wafers by cleaning?
Related terms
Ashing Ultrapure water Native oxide SC-1 (APM) SC-2 (HPM) Ceria (cerium oxide) CMP Dilute hydrofluoric acid (DHF) Dishing Erosion