What is Ultrapure water?
Water from which ions, particles and organic matter have been removed to the extreme. Used in large amounts for wafer cleaning, with purity controlled by resistivity and other measures.
Ultrapure water in the explanations
The fewer ions in water, the less it conducts electricity, so ultrapure water purity is controlled by resistivity.
Which is a typical indicator used to control the purity of …Ultrapure water is used in large quantities in wafer cleaning, above all for rinsing after chemical cleaning.
For what purpose is ultrapure water used in the largest qua…Immersion lithography fills the roughly 1 mm gap between the final lens and wafer with ultrapure water (refractive index about 1.44 at 193 nm) instead of air (about 1).
Which correctly describes ArF immersion lithography?
Questions that mention Ultrapure water (8)
- What is the main purpose of cleaning with ozone dissolved in ultrapure water (ozonated water)?
- Which is a typical indicator used to control the purity of ultrapure water in semiconductor manufacturing?
- For what purpose is ultrapure water used in the largest quantities in semiconductor fabs?
- Which correctly describes ArF immersion lithography?
- What problems are caused by metal contamination such as iron and copper on the wafer surface?
- Which correctly describes how many times cleaning is performed across the whole LSI manufacturing flow?
- Which is an appropriate environmental initiative for the large amounts of water used in semiconductor fabs?
- Which correctly describes the facilities that account for a large share of energy consumption in semiconductor fabs?
Related terms
SPM (sulfuric acid-hydrogen peroxide mixture) Immersion lithography Numerical aperture (NA) CMP Ashing Yield Arsine (AsH3) Mass flow controller (MFC) NF3 (nitrogen trifluoride) Phosphine (PH3)