What is Ceria (cerium oxide)?

An abrasive used in CMP slurries. It reacts chemically with oxide and gives high selectivity to nitride, so it is used for STI CMP.

Ceria (cerium oxide) in the explanations

Slurry disperses abrasive particles tens to over a hundred nm in size—silica (SiO2), ceria (CeO2), alumina—in chemistry containing oxidizers, pH adjusters, corrosion inhibitors and dispersants.
Which correctly describes the slurry used in CMP?
Ceria (cerium oxide) bonds chemically with oxide and removes it efficiently, while additives such as amino-acid surfactants adsorb on nitride and suppress its polishing, giving oxide-to-nitride selectivity of tens to over 100.
Which abrasive particles are often used in STI CMP to achie…
Fixed-abrasive CMP uses pads with abrasive particles such as ceria embedded in resin, supplying only particle-free chemistry.
Which CMP method fixes the abrasive particles in the polish…