What is Dishing?
A CMP phenomenon in which the center of a wide metal line is over-polished into a dish-like depression.
Field: CMP and cleaning
Dishing in the explanations
Dishing occurs in wide metal lines and pads, where the softer metal at the center is polished below the surrounding dielectric, forming a dish-shaped recess that deepens with width.
Which correctly describes 'dishing' in CMP?
Questions that mention Dishing (1)
Related terms
CMP Erosion Ceria (cerium oxide) Dilute hydrofluoric acid (DHF) Megasonic cleaning Native oxide Pad conditioning Pattern collapse Preston's equation RCA clean