What is RCA clean?
A cleaning method that removes particles and organics with SC-1 (ammonia and hydrogen peroxide) and metal contamination with SC-2 (hydrochloric acid and hydrogen peroxide).
Field: CMP and cleaning
RCA clean in the explanations
The RCA clean, published by Kern and colleagues at RCA in 1970, first removes particles and organics with alkaline SC-1, then removes metals—which SC-1 tends to leave behind—as chlorides with acidic SC-2 (HCl:H2O2:H2O).
Which correctly describes the order and purposes of SC-1 an…
Questions that mention RCA clean (1)
Related terms
SC-1 (APM) SC-2 (HPM) Ceria (cerium oxide) CMP Dilute hydrofluoric acid (DHF) Dishing Erosion Megasonic cleaning Native oxide Pad conditioning