What is Pattern collapse?
A defect in which tall, fine patterns topple or stick together during cleaning and drying because of the surface tension of liquid left between them.
Field: CMP and cleaning
Pattern collapse in the explanations
Their small molecular units aid resolution, and high etch resistance lets films around 20 nm thick serve as masks while resisting pattern collapse.
What is an advantage of metal-oxide-containing resists bein…Without liquids there is no pattern collapse on drying and no chemical damage or corrosion, and the frozen particles sublime away, making it well suited to fine structures and copper interconnects.
Which cleaning method, researched and commercialized for re…
Questions that mention Pattern collapse (3)
- What is the main cause of pattern collapse when cleaning and drying high-aspect-ratio patterns?
- What is an advantage of metal-oxide-containing resists being developed for EUV lithography?
- Which cleaning method, researched and commercialized for removing particles without collapsing fine patterns, sprays tiny particles of cryogenic carbon dioxide or argon?
Related terms
Aspect ratio EUV lithography Ceria (cerium oxide) CMP Dilute hydrofluoric acid (DHF) Dishing Erosion Megasonic cleaning Native oxide Pad conditioning