What is Megasonic cleaning?

A cleaning method that applies ultrasound of about 1 MHz to the cleaning solution to remove fine particles from wafer surfaces.

Field: CMP and cleaning

Megasonic cleaning in the explanations

Megasonic cleaning applies ultrasound around 1 MHz to the cleaning liquid, using fast acoustic streaming and a thin boundary layer to detach tiny particles.
Which cleaning method applies MHz-range ultrasound to the c…

Questions that mention Megasonic cleaning (1)

Which cleaning method applies MHz-range ultrasound to the cleaning solution to remove tiny particles from the wafer surface?

Related terms

SC-1 (APM) Ceria (cerium oxide) CMP Dilute hydrofluoric acid (DHF) Dishing Erosion Native oxide Pad conditioning Pattern collapse Preston's equation

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