What is Preston's equation?
The empirical rule that the CMP removal rate is proportional to the product of polishing pressure and the relative speed between pad and wafer.
Field: CMP and cleaning
Preston's equation in the explanations
Preston's equation, removal rate = k × pressure × relative velocity, is an empirical law introduced for glass polishing in 1927.
In Preston's equation for CMP removal rate, which quantity …Since removal rate is roughly proportional to pressure (Preston's equation), the head's rubber membrane is divided into several concentric zones (about 5–10) with independently set air pressures, tailoring removal across the wafer.
What is the main purpose of a CMP head that can vary the pr…Black's equation concerns electromigration, and Preston's equation concerns CMP removal rate.
Which equation is used to determine film stress from the ch…
Questions that mention Preston's equation (3)
- In Preston's equation for CMP removal rate, which quantity is the removal rate proportional to?
- What is the main purpose of a CMP head that can vary the pressure pressing the wafer in several concentric zones?
- Which equation is used to determine film stress from the change in wafer bow before and after deposition?
Related terms
CMP Slurry Black's equation Electromigration Ceria (cerium oxide) Dilute hydrofluoric acid (DHF) Dishing Erosion Megasonic cleaning Native oxide