What is High-k / metal gate?
The combination of a high-dielectric-constant gate insulator and a metal gate electrode. It keeps gate capacitance high while suppressing gate leakage.
Related terms
CFET (complementary FET) DTCO (design-technology co-optimization) EOT (equivalent oxide thickness) FD-SOI (fully depleted SOI) FinFET GAA (gate-all-around) Gate-last (replacement metal gate) Nanosheet Random dopant fluctuation (RDF) SADP (self-aligned double patterning)