TDDB vs HCI vs NBTI: Transistor Wear-Out Mechanisms and Testing

TDDB, HCI and NBTI are all wear-out mechanisms that slowly degrade transistors over their service life, but they come from different stresses and have different results. TDDB (time-dependent dielectric breakdown) is the build-up of defects in a gate dielectric under a sustained field until the film finally breaks down. HCI (hot carrier injection) is damage to the interface and dielectric by carriers accelerated in the strong field near the drain while current flows. NBTI (negative bias temperature instability) is the growth in threshold-voltage magnitude of a pMOS whose gate is held negative at high temperature, even with no current flowing. TDDB destroys the transistor; HCI and NBTI make circuits gradually slower.

AspectTDDB (time-dependent dielectric breakdown)HCI (hot carrier injection)NBTI (negative bias temperature instability)
MechanismA small current through the stressed dielectric creates defects (traps); when the defects connect the two electrodes, the film breaks downCarriers that gain high energy in the strong field near the drain (hot carriers) create interface states or are injected into and trapped in the dielectricNegative gate bias and heat break Si–H bonds at the Si/SiO2 interface, creating interface states, and positive charge builds up in the dielectric
Field directionVertical field across the dielectricLateral field along the channel (peaks at the drain end)Vertical field across the dielectric
Stress conditionWhenever a large voltage is across the gate dielectric; no current is neededWhile current flows with a high drain voltage; in digital circuits, mainly during switchingWhile a pMOS gate is negative relative to its source (gate low, source at VDD); no current is needed
Devices most affectedEvery gate dielectric; it also occurs in the dielectric between interconnect lines (BEOL TDDB)Tends to be worst in short-channel nMOS; also I/O transistors run at higher voltagepMOS. The nMOS counterpart under positive gate bias is PBTI, which became important with high-k films
What shiftsGate leakage rises, passes through soft breakdown and ends in hard breakdown (a gate short)Threshold-voltage shift and lower mobility and drive current. Damage is concentrated at the drain side, so swapping source and drain gives asymmetric characteristicsThreshold-voltage magnitude increases, and drive current and transconductance fall
Time dependence and recoverySudden failure after some time; time to failure is spread out and analyzed with a Weibull distribution. No recoveryGrows gradually as a power law in time. Almost no recoveryGrows as a power law in time with a small exponent, so much of the change happens early. Partly recovers when the stress is removed
Temperature and voltage dependenceLifetime shortens at higher field and higher temperatureAccelerated mainly by drain voltage (lateral field). Temperature dependence varies with device and conditions, and degradation can be larger at low temperatureStrongly accelerated by gate voltage and temperature; worse at high temperature
How it is testedConstant voltage at elevated voltage and temperature until breakdown; times to failure are analyzed statistically and extrapolated to use conditions with models such as the E model or 1/E modelStress at a drain voltage above use conditions, measure the time until the threshold-voltage or drive-current shift reaches a set criterion, then extrapolate. Substrate current serves as an indicator of susceptibilityHold a pMOS gate at negative bias at high temperature and measure the threshold-voltage shift. Because it recovers, measure right after the stress is removed, or without removing it
Main countermeasuresBetter dielectric quality; choosing supply voltage and film thickness to limit the fieldLDD structures or extensions to lower the field at the drain edge, lower supply voltage, oxynitride filmsBetter interface and dielectric processing; aging-aware timing design and guard bands

Figures are typical orders of magnitude and vary by process generation and product.

When to use which

TDDB
Consider it when estimating failures in which a dielectric breaks down and the chip stops working. It is one of the conditions that set gate dielectric thickness and the maximum allowed voltage. In advanced processes with tight wire spacing, TDDB of the dielectric between interconnect lines also matters.
HCI
Treat it as degradation that gradually slows transistors that switch often. It progresses faster in circuits with high activity and is governed by the supply voltage and the field design at the drain edge. It also needs checking in high-voltage I/O and analog circuits.
NBTI
Treat it as degradation that gradually slows pMOS transistors left on at high temperature. It has a large effect in SRAM cells that hold the same value for a long time and in circuits whose clock is stopped, and advanced LSIs include timing margin (guard bands) for it. For nMOS with high-k/metal gates, PBTI is handled alongside it.

FAQ

How can TDDB, HCI and NBTI be told apart?

By the stress condition and the result. If it progresses while a field is held across the gate dielectric and ends with the film breaking down, it is TDDB. If it progresses while current flows with a high drain voltage and the damage is concentrated at the drain side, it is HCI. If it progresses while a pMOS gate stays negative at high temperature and partly recovers when the stress is removed, it is NBTI.

What is the difference between NBTI and PBTI?

NBTI occurs in pMOS under negative gate bias; interface states and positive charge in the dielectric increase the magnitude of the threshold voltage. PBTI occurs in nMOS under positive gate bias; electrons are trapped in defects in high-k films such as HfO2 and the threshold voltage rises. PBTI was small with SiO2 gate dielectrics and became important with the introduction of high-k/metal gates. Together they are called BTI.

Why does measurement timing matter for NBTI?

When the stress is removed, some trapped charge escapes and the threshold-voltage shift starts to recover right away. If the measurement comes long after the stress stops, the degradation is underestimated. Fast measurements or methods that measure without removing the stress are therefore used. Real circuits switch on and off repeatedly, so this recovery is also considered when estimating lifetime.

How is real lifetime obtained from accelerated tests?

Voltage and temperature are raised above use conditions so the device degrades in a short time, the dependence of degradation or time to failure on voltage and temperature is described with models, and the result is extrapolated to use conditions. The Arrhenius model is commonly used for temperature, and for TDDB the field dependence uses the E model, the 1/E model or others. Because the extrapolation spans a wide range, the choice of model can change the predicted lifetime by orders of magnitude, so a conservative model is often chosen.

Check your understanding

Which correctly describes TDDB (time-dependent dielectric breakdown)?

  1. AA phenomenon in which current moves metal atoms in wiring
  2. BA phenomenon in which solder joints fatigue under repeated temperature changes
  3. CA phenomenon in which a gate dielectric under a continuously applied electric field breaks down after a certain time
Show answer and explanation

Answer: C. A phenomenon in which a gate dielectric under a continuously applied electric field breaks down after a certain time

TDDB (time-dependent dielectric breakdown) occurs when a field too weak to cause immediate breakdown, applied for a long time, gradually creates defects in the dielectric until they link up and bridge the electrodes, causing breakdown. Thinner gate dielectrics see higher fields, making it a key reliability concern; it also affects low-k dielectrics between wires. Atom migration in wires is electromigration, and solder fatigue is a temperature-cycling failure.

Which phenomenon degrades transistor characteristics when carriers accelerated by the high electric field near the drain are injected into the gate dielectric?

  1. ANBTI
  2. BHot carrier injection (HCI)
  3. CLatch-up
Show answer and explanation

Answer: B. Hot carrier injection (HCI)

Carriers accelerated by the strong field near the drain become high-energy hot carriers, some of which are injected into the gate dielectric or create interface traps, shifting threshold voltage and drive current. LDD structures, which lower doping at the drain edge to soften the field, and reduced supply voltage suppress it. NBTI occurs even without current flow, and latch-up is turn-on of a parasitic thyristor.

Which degradation phenomenon causes the absolute value of a pMOS transistor's threshold voltage to gradually increase under sustained negative gate voltage and high temperature?

  1. ANBTI
  2. BElectromigration
  3. CESD
Show answer and explanation

Answer: A. NBTI

NBTI (negative bias temperature instability) arises when negative gate bias and high temperature on a pMOS break Si–H bonds at the Si/SiO2 interface, creating interface traps, while positive charge accumulates in the dielectric, increasing the threshold voltage magnitude. Circuits slow gradually over years, so designers build in margin for the degradation. Partial recovery when stress is removed is another characteristic.

  1. In high-k/metal gate nMOS transistors, what is the degradation called in which the threshold voltage shifts when positive gate voltage and high temperature are applied continuously?
  2. Regarding BTI degradation, part of the threshold voltage shift recovers once the stress is removed. What does this imply for evaluation?
  3. In TDDB lifetime evaluation, why are tests run at voltages higher than the actual operating voltage?

Practice Reliability questions

Key terms explained

TDDB (time-dependent dielectric breakdown)
A phenomenon in which an insulating film under sustained voltage eventually breaks down even below its breakdown voltage. It is used to evaluate the lifetime of gate oxides and the like.
Hot carrier injection (HCI)
Degradation in which carriers accelerated by the strong field near the drain are injected into the gate insulator, shifting the threshold voltage and reducing drive current.
NBTI (negative bias temperature instability)
A degradation phenomenon in which the magnitude of a pMOS threshold voltage gradually increases under negative gate voltage at high temperature.
Interface states
Energy levels within the band gap at a semiconductor-insulator interface, created by broken bonds and similar defects. They trap and release carriers, causing threshold shifts, lower mobility and noise.
LDD structure
Short for lightly doped drain. The drain is made lightly doped only at its edge next to the gate, relaxing the electric field and suppressing hot-carrier degradation.
High-k / metal gate
The combination of a high-dielectric-constant gate insulator and a metal gate electrode. It keeps gate capacitance high while suppressing gate leakage.
Weibull distribution
A probability distribution widely used to analyze lifetime data. Its shape parameter can represent early-failure, random-failure and wear-out behavior.
Arrhenius model
A model in which reaction or degradation rates vary with temperature as exp(−Ea/kT). It is used to estimate lifetime at operating temperature from accelerated tests at higher temperatures.

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