Advanced transistors (FinFET and GAA)

In high-k/metal gate transistors, which is one of the main ways to adjust the threshold voltage?

  1. AChoosing the work function of the metal used for the gate electrode
  2. BChanging the wafer diameter
  3. CChanging the package material
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Answer: A. Choosing the work function of the metal used for the gate electrode

With a metal gate, the threshold voltage depends on the work function of the gate metal. Metals with suitable work functions are used for nMOS and pMOS, and thin metal layers are stacked to tune the work function, achieving the target threshold voltages.

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More Advanced transistors (FinFET and GAA) questions

  1. Which correctly describes the gate-last (replacement metal gate) process?
  2. What is an advantage of fully depleted SOI (FD-SOI) transistors?
  3. In very small transistors, what is the phenomenon called in which the threshold voltage varies because of statistical variation in the number and positions of dopant atoms in the channel?
  4. Compared with FinFETs, what is a design advantage of nanosheet GAA transistors?
  5. Which technique, used to make the thin fins of FinFETs, uses sidewall spacers to create patterns finer than the lithography limit?