What is Bottom anti-reflective coating (BARC)?
A layer coated under the resist that suppresses standing waves in the resist and dimension variation over topography caused by light reflected from the substrate.
Field: Lithography
Bottom anti-reflective coating (BARC) in the explanations
A BARC—an organic or inorganic absorbing layer—cuts substrate reflectivity below about 1%, improving dimensional accuracy.
What is the main purpose of the bottom anti-reflective coat…Where a BARC is used, it also serves this role.
What is the main purpose of treating the wafer surface with…
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Related terms
ArF excimer laser Chemically amplified resist Depth of focus (DOF) EUV lithography High-NA EUV Immersion lithography Line edge roughness (LER) Multiple patterning Nanoimprint lithography Numerical aperture (NA)