What is Pellicle?
A thin membrane stretched a short distance above a photomask. It keeps particles off the mask surface, and particles landing on the pellicle are out of focus and do not print.
Field: Lithography
Pellicle in the explanations
A pellicle is a transparent film under 1 µm thick stretched on a frame about 6 mm above the mask; particles landing on it are far out of focus and do not print.
What is the role of the thin membrane (pellicle) stretched …
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Related terms
Photomask (reticle) ArF excimer laser Bottom anti-reflective coating (BARC) Chemically amplified resist Depth of focus (DOF) EUV lithography High-NA EUV Immersion lithography Line edge roughness (LER) Multiple patterning