What is Oxynitride (SiON)?
Gate oxide with nitrogen incorporated. It blocks boron penetration from the gate electrode and has a slightly higher permittivity, so it was used as the gate insulator before high-k films.
Field: Oxidation and diffusion
Oxynitride (SiON) in the explanations
It reacts more gently than oxygen, making it easier to suppress gas-phase particle formation, and under some conditions it incorporates nitrogen to form oxynitride.
Which gas is sometimes used as the oxidant with silane to d…SiON is about 5–6, silicon nitride (Si3N4) about 7 and high-k hafnium oxide about 20–25.
Which value is closest to the relative permittivity of SiO2…Plasma nitridation introduces active nitrogen from a nitrogen plasma into the upper part of an oxide at relatively low temperatures (a few hundred °C), forming SiON with about 10–20% nitrogen.
What is the treatment called that introduces plasma-generat…
Questions that mention Oxynitride (SiON) (4)
- What is the main purpose of introducing nitrogen into the gate oxide to make an oxynitride (SiON)?
- Which gas is sometimes used as the oxidant with silane to deposit silicon oxide or oxynitride films by CVD?
- Which value is closest to the relative permittivity of SiO2 formed by thermal oxidation?
- What is the treatment called that introduces plasma-generated nitrogen into the surface of a thin gate oxide?
Related terms
EOT (equivalent oxide thickness) Plasma Annealing Threshold voltage Silane (SiH4) CVD Thermal oxidation Mobility Bird's beak Deal-Grove model