What is Vacuum evaporation?
Forming a film by heating a material in vacuum until it evaporates and condenses on the substrate. Electron-beam heating handles high-melting-point materials, but step coverage is poor.
Field: Deposition (CVD and PVD)
Vacuum evaporation in the explanations
Vacuum evaporation heats material by resistance or electron beam until it evaporates, and the atoms travel through vacuum (about 10⁻⁴ Pa or better) to coat the substrate.
Which correctly describes vacuum evaporation?
Questions that mention Vacuum evaporation (3)
Related terms
Step coverage Sputtering ALD Area-selective deposition CVD Electroplating Electrostatic chuck HDP-CVD (high-density plasma CVD) LPCVD (low-pressure CVD) Magnetron sputtering