What is Electrostatic chuck?
A mechanism that holds the wafer to its stage by electrostatic force. It works in vacuum and allows backside gas for temperature control; it is widely used in deposition and etch tools.
Field: Deposition (CVD and PVD)
Electrostatic chuck in the explanations
An electrostatic chuck applies hundreds of volts to several kV to electrodes buried in a ceramic platen, clamping the wafer by electrostatic attraction.
In deposition and etching equipment, which mechanism holds …
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Related terms
ALD Area-selective deposition CVD Electroplating HDP-CVD (high-density plasma CVD) LPCVD (low-pressure CVD) Magnetron sputtering PECVD (plasma-enhanced CVD) Reactive sputtering Spin coating