What is Solid solubility?
The maximum concentration of an impurity that can dissolve in a crystal at a given temperature. It sets the upper limit of electrically active dopant concentration.
Field: Ion implantation
Solid solubility in the explanations
Beyond the solid solubility, however, much of the extra dopant stays inactive and mobility declines, so further dose increases yield diminishing reductions in sheet resistance.
Under the same annealing conditions, how does the sheet res…Solid solubility is the maximum dopant concentration a crystal can dissolve in equilibrium—about 2×10²⁰ cm⁻³ for boron in silicon near 1000 °C and around 10²¹ cm⁻³ for arsenic and phosphorus.
When dopants are activated by annealing, which property set…Source/drain regions sit at about this level, close to solid solubility, so maximizing activation is key to low resistance.
If dopants with a dose of 1×10¹⁵ cm⁻² are distributed unifo…
Questions that mention Solid solubility (3)
- Under the same annealing conditions, how does the sheet resistance of the implanted layer generally change when the implant dose is increased?
- When dopants are activated by annealing, which property sets the upper limit of the concentration that can be electrically activated?
- If dopants with a dose of 1×10¹⁵ cm⁻² are distributed uniformly over a depth of 100 nm, what is the approximate average concentration?
Related terms
Annealing Implant dose Mobility Yield Channeling Faraday cup Halo implant (pocket implant) Ion implantation Laser anneal Plasma doping