What is Halo implant (pocket implant)?
Angled implantation of dopant of the same type as the channel near the source and drain edges. It limits the spread of the drain depletion region and suppresses short-channel effects.
Field: Ion implantation
Angled implantation of dopant of the same type as the channel near the source and drain edges. It limits the spread of the drain depletion region and suppresses short-channel effects.
Field: Ion implantation
Annealing Channeling Faraday cup Implant dose Ion implantation Laser anneal Plasma doping Pre-amorphization implant (PAI) Projected range Retrograde well