What is Laser anneal?
Heating only the near-surface region of a wafer for an extremely short time with laser light. It achieves high activation with almost no diffusion.
Field: Ion implantation
Related terms
Annealing Channeling Faraday cup Halo implant (pocket implant) Implant dose Ion implantation Plasma doping Pre-amorphization implant (PAI) Projected range Retrograde well