What is Pre-amorphization implant (PAI)?

Implanting germanium or similar first to make the surface amorphous, so that the following implant does not channel and a shallow junction results.

Field: Ion implantation

Questions that mention Pre-amorphization implant (PAI) (1)

  1. What is the purpose of pre-amorphization implantation (PAI)?

Related terms

Annealing Channeling Faraday cup Halo implant (pocket implant) Implant dose Ion implantation Laser anneal Plasma doping Projected range Retrograde well

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