What is Channeling?
A phenomenon in which ions pass through gaps between rows of crystal atoms and penetrate deeper than expected. It is prevented by tilting the wafer during implantation and similar measures.
Field: Ion implantation
Channeling in the explanations
Ions entering along crystal rows travel through open channels between atomic columns with few collisions and penetrate deeper than intended—channeling.
Which is a common way to suppress channeling (ions travelin…Real profiles are often asymmetric, with channeling tails extending deeper, so more elaborate distribution functions and simulations are used.
Which correctly pairs the distribution that approximates th…Tilting wafers for channeling control or halo implants leaves regions shadowed by tall resist or gates unimplanted—shadowing.
When implanting with the wafer tilted, what is the phenomen…
Questions that mention Channeling (3)
- Which is a common way to suppress channeling (ions traveling too deep through gaps in the crystal) in ion implantation?
- Which correctly pairs the distribution that approximates the depth profile of implanted dopants with the term for the depth of its peak?
- When implanting with the wafer tilted, what is the phenomenon called in which areas in the shadow of tall patterns such as resist receive no implant?
Related terms
Ion implantation Projected range Shadowing Annealing Faraday cup Halo implant (pocket implant) Implant dose Laser anneal Plasma doping Pre-amorphization implant (PAI)