What is Faraday cup?
A device that collects an ion beam and measures the resulting current. In ion implanters it is used to determine the implanted dose.
Field: Ion implantation
Faraday cup in the explanations
A Faraday cup is a cup-shaped electrode that captures the ion beam and measures its charge as current.
In an ion implanter, which component measures the beam curr…
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Related terms
Annealing Channeling Halo implant (pocket implant) Implant dose Ion implantation Laser anneal Plasma doping Pre-amorphization implant (PAI) Projected range Retrograde well