What is SADP (self-aligned double patterning)?
Forming spacers on the sidewalls of a core pattern, removing the core and using the spacers as the mask to make a pitch half of what lithography alone allows. Doing it twice is SAQP.
SADP (self-aligned double patterning) in the explanations
SADP coats a mandrel pattern with a conformal film (e.g., by ALD), forms sidewall spacers, then removes the mandrel, doubling line density.
Which technique, used to make the thin fins of FinFETs, use…Double patterning forms pitches too fine for a single exposure either by splitting the layout into two interleaved patterns exposed and etched separately (LELE) or by doubling lines with sidewall spacers (SADP, SAQP).
Which correctly describes double patterning (multiple patte…Spacer-based SADP self-aligns line positions and largely avoids this problem.
In LELE (litho-etch-litho-etch) double patterning, what is …
Questions that mention SADP (self-aligned double patterning) (3)
Related terms
ALD Multiple patterning Overlay CFET (complementary FET) DTCO (design-technology co-optimization) EOT (equivalent oxide thickness) FD-SOI (fully depleted SOI) FinFET GAA (gate-all-around) Gate-last (replacement metal gate)