What is RTP (rapid thermal processing)?
Heating single wafers to high temperature for a few seconds, typically with lamps. It allows annealing and thin oxide growth while limiting unwanted dopant diffusion.
Field: Oxidation and diffusion
RTP (rapid thermal processing) in the explanations
Today such profiles are also produced by hydrogen or argon anneals and rapid thermal processing.
Heat treatment of a wafer diffuses oxygen out from near the…When anneals of only seconds are needed, RTP tools heat wafers one at a time with lamps.
Which equipment is commonly used to thermally oxidize many …RTP heats and cools wafers with halogen lamps at tens to hundreds of degrees per second, holding temperatures above 1000 °C for only seconds.
What is the heat treatment called that heats wafers one at …
Questions that mention RTP (rapid thermal processing) (3)
- Heat treatment of a wafer diffuses oxygen out from near the surface, creating a low-defect layer at the surface where devices are made. What is this layer called?
- Which equipment is commonly used to thermally oxidize many wafers at once?
- What is the heat treatment called that heats wafers one at a time to high temperature for a few seconds using lamps or similar sources?
Related terms
Annealing DZ (denuded zone) Gettering Thermal oxidation Bird's beak Deal-Grove model Drive-in Dry oxidation Forming gas anneal Interface states