Metrology and analysis

What is mainly measured by ellipsometry (spectroscopic ellipsometry)?

  1. AThe resistance when current is passed through the sample
  2. BThe thickness and refractive index of thin films, obtained from changes in the polarization of reflected light
  3. CThe mass spectrum of a sample sputtered by ions
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Answer: B. The thickness and refractive index of thin films, obtained from changes in the polarization of reflected light

Ellipsometry shines polarized light on a sample, measures how the polarization of the reflected light changes, and compares it with an optical model to determine the thickness and refractive index of thin films. Because it measures accurately without contact or damage, it is widely used to control the thickness of oxide and other films.

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