Metrology and analysis

What can mainly be evaluated by X-ray diffraction (XRD)?

  1. AOrganic contamination on the surface
  2. BSheet resistance
  3. CCrystal structure, lattice constants and film strain
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Answer: C. Crystal structure, lattice constants and film strain

XRD determines crystal structure and lattice constants from the angles at which X-rays are diffracted by atomic planes in a crystal. It is used to evaluate the composition, strain and crystallinity of epitaxial films and similar properties.

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