Metrology and analysis

Which analysis technique locates failures in an LSI by detecting faint light emitted from defective sites during operation?

  1. AXRD
  2. BTXRF
  3. CEmission microscopy (photon emission analysis)
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Answer: C. Emission microscopy (photon emission analysis)

Sites where leakage current flows or transistors behave abnormally can emit very faint light. Emission microscopy detects this light with a highly sensitive camera to locate failures on the chip. Observation is sometimes done from the back of the chip.

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More Metrology and analysis questions

  1. When ArF resist patterns are measured with a CD-SEM, what is the phenomenon called in which electron-beam irradiation makes the patterns shrink?
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  4. Which method is used to measure wafer bow, warp and flatness?
  5. Which technique evaluates whether a measuring instrument's repeatability and reproducibility are small enough compared with the process variation to be controlled?