Environment, health and safety

Which is an appropriate environmental initiative for the large amounts of water used in semiconductor fabs?

  1. ADischarge all used water into the sea untreated
  2. BTreat and recover wastewater and reuse it, for example as feed water for ultrapure water
  3. CDo not record water usage
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Answer: B. Treat and recover wastewater and reuse it, for example as feed water for ultrapure water

Semiconductor fabs use large amounts of ultrapure water to clean wafers, so conserving water resources is an important issue. Relatively clean wastewater is recovered and treated for reuse as feed water for ultrapure water, cooling water and the like, with efforts under way to raise the recovery rate. Discharged wastewater is treated to meet legal standards.

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