Process materials (gases and chemicals)

Which is a typical indicator used to control the purity of ultrapure water in semiconductor manufacturing?

  1. ADepth of color
  2. BResistivity
  3. CViscosity
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Answer: B. Resistivity

The fewer ions in water, the less it conducts electricity, so ultrapure water purity is controlled by resistivity. The theoretical maximum is about 18.2 MΩ·cm at 25 °C, and semiconductor ultrapure water is kept close to it. TOC (total organic carbon), particles and dissolved oxygen are also controlled.

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