Environment, health and safety

Which correctly describes the facilities that account for a large share of energy consumption in semiconductor fabs?

  1. ALighting only
  2. BIn addition to manufacturing equipment, utility facilities such as cleanroom air conditioning, ultrapure water production and exhaust treatment
  3. COffice PCs
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Answer: B. In addition to manufacturing equipment, utility facilities such as cleanroom air conditioning, ultrapure water production and exhaust treatment

In semiconductor fabs, besides the manufacturing equipment itself, utility facilities use much electricity: cleanroom air conditioning that circulates huge volumes of air, ultrapure water production, exhaust and wastewater treatment, cooling water and more. Improving their efficiency is an important theme for fab energy saving and greenhouse gas reduction.

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  1. In storing chemicals, why are substances that may react violently when mixed kept apart?
  2. In workplaces handling hazardous chemicals, what is it called to regularly measure concentrations of hazardous substances in the air and evaluate the work environment?
  3. What is the main reason waste liquids from semiconductor fabs are collected separately as acids, alkalis, fluorides, organic solvents and so on?
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  5. In calculating a company's greenhouse gas emissions, which category covers direct emissions such as fuel combustion and process gas emissions at its own fabs?