What is Spin coating?
Dispensing a liquid at the center of the wafer and spinning it at high speed so centrifugal force spreads a thin, uniform film. It is used for photoresist and spin-on dielectrics.
Field: Deposition (CVD and PVD)
Spin coating in the explanations
Spin coating leaves a thick bead of resist at the wafer edge from surface tension.
What is the process called that removes, with solvent, the …Placing rectangular chips wastes a few percent at the edge, but the crystal-growth method—and processes suited to round substrates such as spin coating and CMP—make this the practical shape.
What is the main reason silicon wafers are round?Spin coating dispenses liquid at the wafer center and spins it at thousands of rpm, spreading it by centrifugal force and flinging off the excess to form a uniform film.
What is the method called in which liquid material is dropp…
Questions that mention Spin coating (3)
- What is the process called that removes, with solvent, the resist that builds up around the wafer edge after spin coating?
- What is the main reason silicon wafers are round?
- What is the method called in which liquid material is dropped onto the center of a wafer and spun at high speed to form a uniform film?
Related terms
Scanner Czochralski (CZ) method Ingot CMP ALD Area-selective deposition CVD Electroplating Electrostatic chuck HDP-CVD (high-density plasma CVD)