Lithography
In current scanner exposure tools, what is the typical maximum area on the wafer that can be exposed in one exposure (one shot)?
- AThe whole wafer (300 mm diameter)
- BAbout 1 mm × 1 mm
- CAbout 26 mm × 33 mm
Show answer and explanation
Answer: C. About 26 mm × 33 mm
A typical scanner exposes an area of about 26 mm × 33 mm on the wafer in one shot and repeats while moving the wafer to cover it all. This size sets the practical maximum chip size; larger chips must stitch multiple shots. High-NA EUV halves this field.
- A. The whole wafer is not exposed at once.
- B. About 1 mm square is too small.
- C. Correct. About 26 mm × 33 mm is typical.