Process materials (gases and chemicals)

Which combination of materials is used in the reflective multilayer of EUV masks?

  1. AGold and silver
  2. BCopper and aluminum
  3. CMolybdenum and silicon
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Answer: C. Molybdenum and silicon

EUV masks and the mirrors of EUV exposure tools use multilayers of about 40 alternating pairs of thin molybdenum (Mo) and silicon (Si) layers. Matching each layer's thickness to the wavelength makes the reflections reinforce one another, reflecting about 70% of 13.5 nm light.

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