What is Drive-in?

Drive-in in the explanations

• Thermal diffusion was often done in two steps: predeposition introduces a set dose shallowly while holding surface concentration constant, then drive-in stops the supply and heats the wafer to spread that fixed dose to the desired depth and profile.

  In thermal diffusion, what is the step called that drives d…

• Drive-in of a fixed dose spreads it out while the surface concentration falls, producing a Gaussian profile.

  In thermal diffusion, which pair correctly gives the profil…

Questions that mention Drive-in (2)

1. In thermal diffusion, what is the step called that drives dopants deeper after a fixed amount has been introduced at the surface?
2. In thermal diffusion, which pair correctly gives the profile shapes for diffusion with a constant surface concentration and for diffusion of a fixed amount of impurity?

Related terms

Thermal diffusion Ion implantation Bird's beak Deal-Grove model Dry oxidation Forming gas anneal Interface states LOCOS Mobile ions Oxidation-enhanced diffusion (OED)