What is Forming gas anneal?
Heat treatment in a mixture of hydrogen and nitrogen (forming gas). Hydrogen terminates dangling bonds at the Si/SiO2 interface, reducing interface states.
Field: Oxidation and diffusion
Related terms
Bird's beak Deal-Grove model Drive-in Dry oxidation Interface states LOCOS Mobile ions Oxidation-enhanced diffusion (OED) Oxynitride (SiON) RTP (rapid thermal processing)