What is Positive photoresist?

A photoresist whose exposed areas dissolve and are removed during development. One whose exposed areas remain is a negative resist.

Field: Lithography

Questions that mention Positive photoresist (1)

  1. Which correctly describes positive photoresist?

Related terms

TMAH ArF excimer laser Bottom anti-reflective coating (BARC) Chemically amplified resist Depth of focus (DOF) EUV lithography High-NA EUV Immersion lithography Line edge roughness (LER) Multiple patterning

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