What is Abatement system?
Equipment that removes hazardous substances from tool exhaust gas by combustion, adsorption, water scrubbing and the like.
Abatement system in the explanations
An abatement system near the equipment renders them harmless by combustion, thermal decomposition, adsorption, water scrubbing and the like before sending them to the fab exhaust system.
For process equipment using vacuum, which device treats exh…
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Related terms
Specialty gases GHS Local exhaust ventilation Lockout/tagout (LOTO) Lower explosive limit (LEL) Oxygen deficiency Perfluorocarbons Risk assessment RoHS Directive SDS (safety data sheet)