Environment, health and safety

For chamber cleaning of CVD equipment, which method has been adopted to reduce PFC emissions?

  1. AIncrease cleaning with C2F6
  2. BRemote plasma, which decomposes NF3 outside the chamber and cleans efficiently with the resulting fluorine radicals
  3. CDo no cleaning at all
Show answer and explanation

Answer: B. Remote plasma, which decomposes NF3 outside the chamber and cleans efficiently with the resulting fluorine radicals

Chambers used to be cleaned by turning PFCs such as C2F6 into plasma inside the chamber, but large amounts were emitted undecomposed. The remote plasma method decomposes NF3 highly efficiently outside the chamber and sends only fluorine radicals into it, greatly reducing greenhouse gas emissions.

Practice this topic Back to topic

More Environment, health and safety questions

  1. In first aid for hydrofluoric acid on the skin, which agent may be used after rinsing with plenty of water?
  2. Which is appropriate handling of waste containing hazardous substances such as arsenic?
  3. What is the activity called in which, before starting work, workers discuss the hazards hidden in the task and confirm countermeasures?
  4. Which is appropriate equipment to prepare for fire in a cleanroom?
  5. Which technique evaluates environmental impact across a product's whole life, from raw material procurement through manufacturing, use and disposal?