What is Perfluorocarbons?

Also called PFCs. Fluorinated gases such as CF4 and C2F6 used in etching and chamber cleaning. Their greenhouse effect is very large.

Field: Environment, health and safety

Questions that mention Perfluorocarbons (1)

  1. What is the main reason emissions of PFCs (perfluorocarbons), used for etching and equipment cleaning, are considered an environmental problem?

Related terms

Abatement system GHS Local exhaust ventilation Lockout/tagout (LOTO) Lower explosive limit (LEL) Oxygen deficiency Risk assessment RoHS Directive SDS (safety data sheet)

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